Profile: Ebara Technology is a manufacturer of vacuum pumps and advanced technology products for clean environments. Our semiconductor equipment division is the supplier of chemical mechanical polishing systems that installed in semiconductor production and pilot line facilities. Our products line include dry pumps, turbo pumps, vacuum hardware, vacuum valves and foreline traps. Our EBARA dry pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration and lower operating costs.