Tek-vac Industries, Inc.

Profile: Tek-vac Industries, Inc. designes and manufactures custom & standard semiconductor process equipment. Our product line includes vacuum chambers, vacuum furnaces, process gas treatment systems, gloveboxes, fluidized bed CVD reactors, metal organic CVD systems, ionization gauge tubes, gas metering valves, mass flow control electronics and vacuum feedthroughs. We deliver coating processes, helium mass spectrometer leak detection, dye penetrant testing, thermal & vacuum testing, brazing, welding and machining services. Our VARI-VACŪ is a smooth acting, bellows sealing gas metering valve available with manual, motor driven, solenoid and electropneumatic controlling actuator. We deal with semiconductor materials, such as silicon, silicon nitride, silicon dioxide, aluminum, graphite, high temperature polymers and gallium nitride.

22 Products/Services (Click for related suppliers)
•	Chemical Vapor Deposition	•	Gas Metering Valves	•	High Density Plasma Etching Systems
•	Industrial Machinery	•	Industrial Plastics	•	Liquid Phase Epitaxy Systems
•	Machine Shops	•	Mass Spectrometer Gas Inlet Systems	•	Microwave PECVD Systems
•	Multichamber Plasma CVD Processing Systems	•	Photoresist Curing Systems	•	Plasma CVD & Etching Systems
•	Plasma Etching Equipment	•	Plastic Fabrication	•	Reactive Ion Etchers
•	Residual Gas Analyzer Systems	•	Scrubber	•	Ultra-High Vacuum CVD Systems
•	Vacuum Chamber Systems	•	Vacuum Coating Stations	•	Vacuum CVD Process Systems
•	Vacuum Furnaces